Real Time Touch



new TOP 200 Companies filing patents this week

new Companies with the Most Patent Filings (2010+)




Real Time Touch

Suss Microtec Lithography Gmbh patents


Recent patent applications related to Suss Microtec Lithography Gmbh. Suss Microtec Lithography Gmbh is listed as an Agent/Assignee. Note: Suss Microtec Lithography Gmbh may have other listings under different names/spellings. We're not affiliated with Suss Microtec Lithography Gmbh, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "S" | Suss Microtec Lithography Gmbh-related inventors


Positioning device

The invention relates to a positioning device for positioning a substrate, in particular a wafer, comprising: a process chamber; a base body; a carrier element which comprises a support for supporting the substrate, the carrier element being arranged above the base body and formed movable in terms of distance from the base body; and a holder for an additional substrate, in particular an additional wafer or a mask, the holder being arranged opposite the carrier element; wherein there is, between the base body and the carrier element, a sealed-off cavity to which a pressure, in particular a negative pressure, can be applied so as to prevent undesired movement of the carrier element as a result of the action of an external force.. . ... Suss Microtec Lithography Gmbh

Semiconductor bonding apparatus and related techniques

A semiconductor structure bonding apparatus is disclosed. The apparatus may include a leveling adjustment system configured to provide leveling adjustment of upper and lower block assemblies of the apparatus. ... Suss Microtec Lithography Gmbh

Apparatus and method for semiconductor wafer leveling, force balancing and contact sensing

A wafer bonder apparatus, includes a lower chuck, an upper chuck, a process chamber and three adjustment mechanisms. The three adjustment mechanisms are arranged around a top lid spaced apart from each other and are located outside of the process chamber. ... Suss Microtec Lithography Gmbh

Light source arrangement for a photolithography exposure system and photolithography exposure system

A light source arrangement for a photolithography exposure system comprises at least three light sources with different wavelengths, and a beam splitting unit comprising at least three inputs, one output, and at least two reflecting faces. An input is assigned to each light source and each reflecting face. ... Suss Microtec Lithography Gmbh

System and related techniques for handling aligned substrate pairs

An industrial-scale system and method for handling precisely aligned and centered semiconductor substrate (e.g., wafer) pairs for substrate-to-substrate (e.g., wafer-to-wafer) aligning and bonding applications is provided. Some embodiments include an aligned substrate transport device having a frame member and a spacer assembly. ... Suss Microtec Lithography Gmbh

Method for coating a substrate and also a coating system

Method for coating a substrate with a coating material is described, in particular with a coating or photoresist, wherein said substrate is provided in said method. Said coating material is applied to said upper side of said substrate. ... Suss Microtec Lithography Gmbh

Semiconductor bonding apparatus and related techniques

A semiconductor structure bonding apparatus is disclosed. The apparatus may include a leveling adjustment system configured to provide leveling adjustment of upper and lower block assemblies of the apparatus. ... Suss Microtec Lithography Gmbh

Spacer displacement device for a wafer illumination unit and wafer illumination unit

A spacer displacement device for a wafer illumination unit comprises an actuator, a spacer which can be displaced between an active and an inactive position by the actuator, and a force transmission element which is coupled to the actuator. The force transmission element consists of wire.. ... Suss Microtec Lithography Gmbh








ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009



###

This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Suss Microtec Lithography Gmbh in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Suss Microtec Lithography Gmbh with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

###