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Tel Fsi Inc patents


Recent patent applications related to Tel Fsi Inc. Tel Fsi Inc is listed as an Agent/Assignee. Note: Tel Fsi Inc may have other listings under different names/spellings. We're not affiliated with Tel Fsi Inc, we're just tracking patents.

ARCHIVE: New 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 | Company Directory "T" | Tel Fsi Inc-related inventors


Systems and methods for rotating and translating a substrate in a process chamber

Disclosed herein are systems and methods related to a handling system used to move a semiconductor substrate within a process chamber during treatment. The handling system moves the substrate back-and-forth between two locations in an arc-like motion around a pivot point, while simultaneously rotating the substrate around its own center point.. ... Tel Fsi Inc

Recipe selectable dispense system and method of operating

An apparatus for cleaning a microelectronic workpiece and a method of operating is described. The apparatus includes a workpiece holding mechanism to support and hold a workpiece, a chemical supply mechanism configured to supply multiple chemical fluids including gas-phase components and liquid-phase components, a dispense mechanism arranged to dispense one or more chemical compositions onto the workpiece, and a valve mechanism fluidically disposed between the chemical supply mechanism and the dispense mechanism. ... Tel Fsi Inc

Wafer edge lift pin design for manufacturing a semiconductor device

A wafer edge lift pin of an apparatus for manufacturing a semiconductor device is described. The wafer edge lift pin includes a top section containing a notch portion having a horizontal upwardly facing surface for supporting a wafer and a vertically sloped surface for lateral confinement of the wafer, wherein the notch portion is horizontally swept away from the wafer along a radius, a base section below the top section, the base section having a diameter that is greater than a diameter of the top section across the notch portion, and a bottom section having a diameter that is smaller than the diameter of the base section. ... Tel Fsi Inc

Translating and rotating chuck for processing microelectronic substrates in a process chamber

Cleaning systems and methods for semiconductor fabrication use rotatable and translatable chuck assemblies that incorporate a compact drive system to cause chuck rotation. The system uses an offset drive gear that drives a ring gear. ... Tel Fsi Inc

Magnetically levitated and rotated chuck for processing microelectronic substrates in a process chamber

Cleaning systems and methods for semiconductor fabrication use rotatable and optionally translatable chuck assemblies that incorporate magnetic levitation and rotation functionality to cause chuck rotation. The rotating chuck components do not physically contact other chuck components when levitated and rotating. ... Tel Fsi Inc

Systems and methods for treating substrates with cryogenic fluid mixtures

Disclosed herein are systems and methods for treating the surface of a microelectronic substrate, and in particular, relate to an apparatus and method for scanning the microelectronic substrate through a cryogenic fluid mixture used to treat an exposed surface of the microelectronic substrate. The fluid mixture may be expanded through a nozzle to form an aerosol spray or gas cluster jet (gcj) spray may impinge the microelectronic substrate and remove particles from the microelectronic substrate's surface. ... Tel Fsi Inc

Apparatus for spraying cryogenic fluids

Disclosed herein are systems and methods for treating the surface of a microelectronic substrate, and in particular, relate to an apparatus and method for scanning the microelectronic substrate through a cryogenic fluid mixture used to treat an exposed surface of the microelectronic substrate. In particular, an improved nozzle design used to expand the fluid mixture is disclosed herein. ... Tel Fsi Inc

Systems & methods for metering a dose volume of fluid used to treat microelectronic substrates

The disclosure relates to systems and methods for metering a dose volume of fluid that may be used to treat microelectronic substrates. The system enables precision dispensing of relatively small amounts of a liquid chemical into a chemical bath or processing chamber for microelectronic substrates. ... Tel Fsi Inc








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This listing is an abstract for educational and research purposes is only meant as a recent sample of applications filed, not a comprehensive history. Freshpatents.com is not affiliated or associated with Tel Fsi Inc in any way and there may be associated servicemarks. This data is also published to the public by the USPTO and available for free on their website. Note that there may be alternative spellings for Tel Fsi Inc with additional patents listed. Browse our Agent directory for other possible listings. Page by FreshPatents.com

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